US 2004/0169700 A1 · Bubble-jet type ink-jet printhead

Abstract

A bubble-jet type ink-jet printhead is provided. The bubble-jet type ink-jet printhead includes a substrate, a plurality of chamber walls arranged parallel to one another on the substrate for dividing a chamber into a plurality unit chambers having a predetermined height, which are ink flow areas, a bubble generating means, provided for each unit chamber, which includes two unit heaters spaced apart by a predetermined distance on the substrate, and a nozzle plate, combined above the substrate, in which a plurality of nozzles are formed, each nozzle corresponding to a region between the two unit heaters of each bubble generating means. In this case, ink is supplied from both sides of the unit chamber. The ink-jet printhead is constructed such that a unit chamber is provided for each nozzle and bubbles are generated chamber on both sides of a nozzle within the unit chamber, thereby effectively preventing a back flow of ink while facilitating adjustment of the size of ink droplet ejected through the nozzle. Furthermore, the ink-jet printhead allows for high-speed and high-pressure ink ejection with relatively low pressure compared to a conventional printhead. In particular, an ink channel having a simple structure is provided, thereby avoiding the clogging of the ink channel due to foreign materials while effectively preventing defectiveness of the printhead.

Claims38

Dependent claims

A bubble-jet type ink jet printhead, comprising:

a substrate;
a plurality of chamber walls arranged parallel to one another on the substrate for dividing a chamber into a plurality of unit chambers having a predetermined height, each of said plurality of unit chambers are ink flow areas;
a bubble generating means provided for each unit chamber, said bubble generating means comprising two unit heaters spaced apart by a predetermined distance on the substrate;
and
a nozzle plate, attached to a top side of each of said plurality of chamber walls, said nozzle plate being perforated by a plurality of nozzle holes, each nozzle hole corresponding to a region between the two unit heaters of each bubble generating means, wherein ink is supplied from both sides of each unit chamber.

2 more elements

A method of manufacturing bubble-jet type ink jet printhead, comprising the steps of:

depositing, patterning, and etching a resistive material on a silicon substrate;
depositing, patterning, and etching an individual signal line over a portion of said resistive material;
depositing a first electrically insulating layer over said silicon substrate;
etching a hole in said first electrically insulating layer exposing a portion of said resistive material absent of said individual signal line;
depositing, patterning, and etching a common signal line, said common signal line being in electrical contact with said resistive material via said hole in said first electrically insulating layer;
depositing a second electrically insulating layer over said silicon substrate;
etching through a portion of said first and second insulating layers to expose a portion of said individual signal line in a region absent of said resistive material;
depositing, patterning, and etching a film to form a plurality of chamber walls, a first of said plurality of chamber walls being on top of a substantial portion of said individual signal line, and a second of said plurality of chamber walls being parallel to said first chamber wall, said second chamber wall being on an opposite side of said hole in said first insulating layer than said first chamber wall;
and
attaching a nozzle plate to a top portion of said plurality of chamber walls, said nozzle plate being perforated by a plurality of nozzle holes, one of said plurality of nozzle holes being directly above said hole in said first insulating layer.

7 more elements

Dependencies are inferred from the claim text.

Bubble-jet type ink-jet printhead

Life of this patent

Bubble-jet type ink-jet printhead

Life of this patent

Abstract

Claims38