Temperature sensor and method for production thereof

Abstract

A temperature sensor having sturdy construction is simple to install and to package, is uncomplicated to manufacture, and suitable for reliably detecting rapid temperature changes. The temperature sensor (1) includes a silicon substrate (2) in which at least one porous area (3) is formed, the degree of porosity and the thickness of the porous area (3) being chosen so that the porous area (3) is thermally isolated from the silicon substrate (2). In addition, the temperature sensor (1) includes temperature measuring elements (6, 7) for detecting the temperature difference between the silicon substrate (2) and the porous area (3). The temperature sensor may also include heating elements for testing the sensor function.

Dependencies are inferred from the claim text.