High density probe card apparatus and method of manufacture

2- An apparatus as in claim 1 wherein said two-metal probe needles comprise a noble metal or a metal having surface oxidation integrally connected with conductive metal fingers of a different composition.

3- An apparatus as in claim 1 wherein said two-metal needle probes comprise a single conductive metal having a noble metal deposited on the tips.

4- An apparatus as in claim 1 wherein said needle tips extending beyond the film and said central opening in the support block are formed downward below the level of said block.

5- An apparatus as in claim 1 wherein said noble metal tips are in the range of 0.00075 to 0.0015 inches thick.

6- An apparatus as in claim 1 wherein said noble metal tips are a minimum of 0.050 inches long.

7- An apparatus as in claim 1 wherein the width of probe needle tips is in the range of 0.00075 to 0.002 inches.

8- An apparatus as in claim 1 wherein said noble metal comprises palladium.

9- An apparatus as in claim 1 wherein said noble metal comprises rhodium.

10- An apparatus as in claim 1 wherein said noble metal comprises gold.

11- An apparatus as in claim 1 wherein said second metal comprises a beryllium and copper alloy.

12- An apparatus as in claim 1 wherein said needle fingers are spaced further apart than the needle ties.

13- An apparatus as in claim 1 wherein said polymeric film is a thermally stable dielectric material.

14- An apparatus as in claim 1 wherein said polymeric film is in the range of 0.001 to 0.003 inches thick.

15- An apparatus as in claim 1 wherein said polymeric film is of the polyimide family.

16- An apparatus as in claim 1 wherein said support block comprises a dielectric material having a coefficient of thermal expansion in the range of 2 to 8 PPM.

17- An apparatus as in claim 1 wherein said support block comprises a ceramic material.

18- An apparatus as in claim 1 wherein said support block comprises a composite polymer.

19- An apparatus as in claim 1 wherein said the outer perimeter of said support block conforms to an opening in a probe card.

20- An apparatus as in claim 1 wherein said needle fingers are customized to optimize impedance of specific needles.

21- An apparatus as in claim 1 further including a ground plane patterned on the second surface of said polymeric film.

22- An apparatus as in claim 1 wherein the needle pattern is software generated and input to a laser.

23- An apparatus as in claim 1 wherein the needles are at least partially formed by laser ablation.

24- A contact apparatus including:

• a support block, having a curved shape on one major surface, and a planar second surface,
• one or more comb assemblages having a plurality of two-metal needles adhered to the surface of a dielectric film with the needle tips extending beyond the film, and the fingers secured to the curved surface of said support block.

25- A contact apparatus including:

• a support block, having two parallel major surfaces,
• one or more comb assemblages having a plurality of two-metal needles adhered to the surface of a dielectric film with the needle tips extending beyond the film, and the fingers secured to one of the major surface of said support block.