Electron emission devices
AssigneeHewlett-Packard Development Company, L.P.
InventorsHuei-Pei Kuo, Si-Ty Lam, Sam Burriesci, Steven Louis Naberhuis, Henryk Birecki, Xia Sheng
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Abstract
An electron emission device with nano-protrusions is described. Electrons are emitted from the nano-protrusions and directed by one or more conductors into beams. The beams may be shaped to be collimated, diverged, or converged. The shaped beams from one or more nano-protrusions may be focused onto a target spot through the use of additional electron optics.
Claims51
An electron emitting device, comprising:
- an electron supply structure;
- at least one nano-protrusion integrally formed on a top of the electron supply structure;
- an emitter insulator formed above the electron supply structure;
- and
- a top conductor formed above the emitter insulator such that the at least one nano-protrusion is exposed.
An electron beam focusing device, comprising:
- a plurality of electron beam emitters;
- and
- an electron beam focusing lens configured to focus electron beams emitted from the plurality of electron beam devices.
A method for forming electron emitting device, comprising:
- forming an electron supply structure;
- integrally forming at least one nano-protrusion on a top of the electron supply structure;
- forming an emitter insulator above the electron supply structure;
- forming a top conductor above the emitter insulator;
- and
- exposing the at least one nano-protrusion.
A method for forming an electron beam focusing device, comprising:
- forming a plurality of electron beam emitters;
- and
- forming an electron beam focusing lens configured to focus electron beams emitted from the plurality of electron beam emitters.
Dependencies are inferred from the claim text.