Apparatus to orientate a body with respect to a surface
AssigneeBoard of Regents, The University of Texas System
InventorsByung Jin Choi, Sidlgata V. Sreenivasan, Stephen C. Johnson
Life of this patent
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Abstract
An apparatus to orientate a body with respect to a surface spaced-apart from the body. The apparatus comprises a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system, and an actuation system is coupled to the flexure system. The body is coupled to the flexure system to rotate about the first and the second axes in response to movement caused by the actuation system. The movement of the body about the first axis being decoupled from movement of the body about the second axis.
Claims27
An apparatus to orientate a body with respect to a surface spaced-apart from said body, said apparatus comprising:
- a flexure system;
- a body;
- and
- an actuation system coupled to said flexure system with said body being coupled to said flexure system to move in response to movement caused by said actuation system.
An apparatus to orientate a body with respect to a surface spaced-apart from said body, said apparatus comprising:
- a flexure system having a range of motion associated therewith;
- a body;
- and
- a pre-calibration stage to position said body to be spaced-apart from said surface a distance with said distance being less than said range of motion.
An orientation stage for achieving fine movement and alignment of a template in an imprint lithography process, said orientation stage comprising:
- a first flexure member with first and second arms extending therefrom, each said arm including a first set of flexure joints which provide pivotal motion of said first flexure member about a first orientation axis;
- a second flexure member having third and fourth arms extending therefrom, each said arm including a second set of flexure joints which provide pivotal motion of said second flexure member about a second orientation axis;
- and
- a support coupled to said second flexure member and adapted for holding a template in place during imprinting, wherein said first and second flexure members are further adapted to be joined so that said template in said support moves about a pivot point intersected by said first and second orientation axis.
Dependencies are inferred from the claim text.