Piezoelectric/electrostrictive device
AssigneeNGK Insulators, Ltd.
InventorsMasahiko Namerikawa, Kazuyoshi Shibata
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Abstract
There is disclosed a piezoelectric/electrostrictive device which has large vibration isolation properties and which copes with high-rate access and densification of data and which is capable of inhibiting off-track from being caused and which comprises: a substrate including a support portion constituted of a thick member and two arm portions constituted of thin-plate members extended from the support portion; and a driving member disposed on at least one arm portion and in which a plurality of grooves is formed in at least a surface positioned on an extending-direction side of the at least one arm portion in the support portion.
Claims14
A piezoelectric/electrostrictive device comprising:
- a substrate including a support portion constituted of a thick member and two arm portions constituted of thin-plate members extended from the support portion;
- and
- a driving member including at least one pair of electrodes and one piezoelectric/electrostrictive layer which are disposed on at least one arm portion,
- wherein a plurality of grooves is formed in at least a surface positioned on an extending-direction side of said at least one arm portion in the support portion.
Dependencies are inferred from the claim text.