Shaft sealing apparatus
AssigneeTeijin Seiki Co., Ltd.
InventorsTetsuya Watanabe, Hiroki Mori, Chohei Okuno
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AssigneeTeijin Seiki Co., Ltd.
InventorsTetsuya Watanabe, Hiroki Mori, Chohei Okuno
Estimating the term…
Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (μm).
A shaft sealing apparatus, comprising:
A shaft sealing apparatus, comprising:
A shaft sealing apparatus, comprising:
A shaft sealing apparatus, comprising:
16 A shaft sealing apparatus as set forth in claim 15, which further comprises a base member in the form of a circular shape and provided on said first axial end of said center shaft, a first fixed member in the form of an annular ring shape and provided on said first axial end of said sleeve shaft, and a second fixed member in the form of an annular ring shape and provided on said base portion of said vacuum casing, said base member and said first fixed member collectively constituting said first labyrinth seal unit, said first and second fixed members collectively constituting said second labyrinth seal unit.
Dependencies are inferred from the claim text.