Electron emitter and method for fabricating the same, cold cathode field electron emission element and method for fabricating the same, and cold cathode field electron emission display and method for manufacturing the same

A cold cathode field emission device comprising;

• (A) a cathode electrode formed on a supporting member,
• (B) an insulating layer formed on the supporting member and the cathode electrode,
• (C) a gate electrode formed on the insulating layer,
• (D) an opening portion formed through the gate electrode and the insulating layer, and
• (E) an electron emitting portion exposed in the bottom portion of the opening portion,
• in which said electron emitting portion comprises a matrix, and carbon nanotube structures embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected.

A cold cathode field emission device comprising;

• (A) a cathode electrode formed on a supporting member, and
• (B) an electron emitting portion formed on the cathode electrode,
• in which said electron emitting portion comprises a matrix, and carbon nanotube structures embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected, and
• the matrix comprises a metal oxide.

A cold cathode field emission device comprising;

• (A) a cathode electrode formed on a supporting member,
• (B) an insulating layer formed on the supporting member and the cathode electrode,
• (C) a gate electrode formed on the insulating layer,
• (D) an opening portion formed through the gate electrode and the insulating layer, and
• (E) an electron emitting portion exposed in the bottom portion of the opening portion,
• in which said electron emitting portion comprises a matrix, and carbon nanotube structures embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected, and the matrix comprises a metal oxide.

A cold cathode field emission display comprising a cathode panel having a plurality of cold cathode field emission devices and an anode panel having a phosphor layer and an anode electrode, said cathode panel and said anode panel being bonded to each other in their circumferential portions,

• in which each cold cathode field emission device comprises;
• (A) a cathode electrode formed on a supporting member, and
• (B) an electron emitting portion formed on the cathode electrode, and
• said electron emitting portion comprises a matrix, and carbon nanotube structures embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected.

A cold cathode field emission display comprising a cathode panel having a plurality of cold cathode field emission devices and an anode panel having a phosphor layer and an anode electrode, said cathode panel and said anode panel being bonded to each other in their circumferential portions,

• in which each cold cathode field emission device comprises;
• (A) a cathode electrode formed on a supporting member,
• (B) an insulating layer formed on the supporting member and the cathode electrode,
• (C) a gate electrode formed on the insulating layer,
• (D) an opening portion formed through the gate electrode and the insulating layer, and
• (E) an electron emitting portion exposed in the bottom portion of the opening portion, and
• said electron emitting portion comprises a matrix, and carbon nanotube structures embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected.

A cold cathode field emission display comprising a cathode panel having a plurality of cold cathode field emission devices and an anode panel having a phosphor layer and an anode electrode, said cathode panel and said anode panel being bonded to each other in their circumferential portions,

• in which each cold cathode field emission device comprises;
• (A) a cathode electrode formed on a supporting member, and
• (B) an electron emitting portion formed on the cathode electrode, and
• said electron emitting portion comprises a matrix, and carbon nanotube structures embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected, and
• the matrix comprises a metal oxide.

A cold cathode field emission display comprising a cathode panel having a plurality of cold cathode field emission devices and an anode panel having a phosphor layer and an anode electrode, said cathode panel and said anode panel being bonded to each other in their circumferential portions,

• in which each cold cathode field emission device comprises;
• (A) a cathode electrode formed on a supporting member,
• (B) an insulating layer formed on the supporting member and the cathode electrode,
• (C) a gate electrode formed on the insulating layer,
• (D) an opening portion formed through the gate electrode and the insulating layer, and
• (E) an electron emitting portion exposed in the bottom portion of the opening portion, and
• said electron emitting portion comprises a matrix, and carbon nanotube structures embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected, and
• the matrix comprises a metal oxide.

A manufacturing method of a cold cathode field emission device comprising;

• (A) a cathode electrode formed on a supporting member, and
• (B) an electron emitting portion formed on the cathode electrode,
• said manufacturing method comprising the steps of;
• (a) forming, on a predetermined region of the cathode electrode formed on the supporting member, a composite layer having a constitution in which carbon nanotube structures are embedded in a matrix, and
• (b) removing the matrix in the surface of the composite layer, to obtain the electron emitting portion in which the carbon nanotube structures are embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected.

A manufacturing method of a cold cathode field emission device comprising;

• (A) a cathode electrode formed on a supporting member,
• (B) an insulating layer formed on the supporting member and the cathode electrode,
• (C) a gate electrode formed on the insulating layer,
• (D) an opening portion formed through the gate electrode and the insulating layer, and
• (E) an electron emitting portion exposed in the bottom portion of the opening portion,
• said manufacturing method comprising the steps of;
• (a) forming, on a predetermined region of the cathode electrode formed on the supporting member, a composite layer having a constitution in which carbon nanotube structures are embedded in a matrix,
• (b) forming the insulating layer on the entire surface,
• (c) forming the gate electrode on the insulating layer,
• (d) forming the opening portion at least through the insulating layer, to expose the composite layer in the bottom portion of the opening portion, and
• (e) removing the matrix in the surface of the exposed composite layer, to obtain the electron emitting portion in which the carbon nanotube structures are embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected.

A manufacturing method of a cold cathode field emission device comprising;

• (A) a cathode electrode formed on a supporting member, and
• (B) an electron emitting portion formed on the cathode electrode,
• said manufacturing method comprising the steps of;
• (a) forming the cathode electrode on the supporting member,
• (b) applying, onto the cathode electrode, a metal compound solution in which carbon nanotube structures are dispersed, and
• (c) firing the metal compound, to obtain the electron emitting portion in which the carbon nanotube structures are fixed to the surface of the cathode electrode with a matrix containing a metal atom constituting the metal compound.

A manufacturing method of a cold cathode field emission device comprising;

• (A) a cathode electrode formed on a supporting member,
• (B) an insulating layer formed on the supporting member and the cathode electrode,
• (C) a gate electrode formed on the insulating layer,
• (D) an opening portion formed through the gate electrode and the insulating layer, and
• (E) an electron emitting portion exposed in the bottom portion of the opening portion,
• said manufacturing method comprising the steps of;
• (a) forming the cathode electrode on the supporting member,
• (b) applying, onto the cathode electrode, a metal compound solution in which carbon nanotube structures are dispersed,
• (c) firing the metal compound, to obtain the electron emitting portion in which the carbon nanotube structures are fixed to the surface of the cathode electrode with a matrix containing a metal atom constituting the metal compound,
• (d) forming the insulating layer on the entire surface,
• (e) forming the gate electrode on the insulating layer, and
• (f) forming the opening portion at least through the insulating layer, to expose the electron emitting portion in the bottom portion of the opening portion.

A manufacturing method of a cold cathode field emission display in which a cathode panel having a plurality of cold cathode field emission devices and an anode panel having a phosphor layer and an anode electrode are bonded to each other in their circumferential portions,

• each cold cathode field emission device comprising;
• (A) a cathode electrode formed on a supporting member, and
• (B) an electron emitting portion formed on the cathode electrode,
• said manufacturing method including the steps of;
• (a) forming, on a predetermined region of the cathode electrode formed on the supporting member, a composite layer having a constitution in which carbon nanotube structures are embedded in a matrix, and
• (b) removing the matrix in the surface of the composite layer, to obtain the electron emitting portion in which the carbon nanotube structures are embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected, thereby to form the cold cathode field emission device.

A manufacturing method of a cold cathode field emission display in which a cathode panel having a plurality of cold cathode field emission devices and an anode panel having a phosphor layer and an anode electrode are bonded to each other in their circumferential portion,

• each cold cathode field emission device comprising;
• (A) a cathode electrode formed on a supporting member,
• (B) an insulating layer formed on the supporting member and the cathode electrode,
• (C) a gate electrode formed on the insulating layer,
• (D) an opening portion formed through the gate electrode and the insulating layer, and
• (E) an electron emitting portion exposed in the bottom portion of the opening portion,
• said manufacturing method including the steps of;
• (a) forming, on a predetermined region of the cathode electrode formed on the supporting member, a composite layer having a constitution in which carbon nanotube structures are embedded in a matrix,
• (b) forming the insulating layer on the entire surface,
• (c) forming the gate electrode on the insulating layer,
• (d) forming the opening portion at least through the insulating layer, to expose the composite layer in the bottom portion of the opening portion, and
• (e) removing the matrix in the surface of the exposed composite layer, to obtain the electron emitting portion in which the carbon nanotube structures are embedded in the matrix in a state where the top portion of each carbon nanotube structure is projected, thereby to form the cold cathode field emission device.

A manufacturing method of a cold cathode field emission display in which a cathode panel having a plurality of cold cathode field emission devices and an anode panel having a phosphor layer and an anode electrode are bonded to each other in their circumferential portions,

• each cold cathode field emission device comprising;
• (A) a cathode electrode formed on a supporting member, and
• (B) an electron emitting portion formed on the cathode electrode,
• said manufacturing method including the steps of;
• (a) forming the cathode electrode on the supporting member,
• (b) applying, onto the cathode electrode, a metal compound solution in which carbon nanotube structures are dispersed, and
• (c) firing the metal compound, to obtain the electron emitting portion in which the carbon nanotube structures are fixed to the surface of the cathode electrode with a matrix containing a metal atom constituting the metal compound, thereby to form the cold cathode field emission device.

A manufacturing method of a cold cathode field emission display in which a cathode panel having a plurality of cold cathode field emission devices and an anode panel having a phosphor layer and an anode electrode are bonded to each other in their circumferential portion,

• each cold cathode field emission device comprising;
• (A) a cathode electrode formed on a supporting member,
• (B) an insulating layer formed on the supporting member and the cathode electrode,
• (C) a gate electrode formed on the insulating layer,
• (D) an opening portion formed through the gate electrode and the insulating layer, and
• (E) an electron emitting portion exposed in the bottom portion of the opening portion,
• said manufacturing method including the steps of;
• (a) forming the cathode electrode on the supporting member,
• (b) applying, onto the cathode electrode, a metal compound solution in which carbon nanotube structures are dispersed,
• (c) firing the metal compound, to obtain the electron emitting portion in which the carbon nanotube structures are fixed to the surface of the cathode electrode with a matrix containing a metal atom constituting the metal compound,
• (d) forming the insulating layer on the entire surface,
• (e) forming the gate electrode on the insulating layer, and
• (f) forming the opening portion at least through the insulating layer, to expose the electron emitting portion in the bottom portion of the opening portion, thereby to form the cold cathode field emission device.