Composition and method for electrodeposition of metal on a work piece
AssigneeNovellus Systems, Inc.
InventorVishwas Hardikar
Life of this patent
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Abstract
A composition for electrodeposition of a metal on a work piece, which electrodeposition is conducted at an electrodeposition temperature, is provided. The composition comprises a metal salt, a polymer suppressor having a cloud point, an accelerator and an electrolyte. If the cloud point is greater than the electrodeposition temperature, an anion is also present in an amount sufficient to lower the cloud point of the polymer suppressor to a temperature approximately no greater than the electrodeposition temperature.
Claims45
A composition for electrodeposition of a metal on a work piece, which electrodeposition is conducted at an electrodeposition temperature, the composition comprising:
- a metal salt;
- a polymer suppressor having a cloud point;
- if said cloud point is greater than said electrodeposition temperature, an anion present in an amount sufficient to lower said cloud point to a temperature approximately no greater than the electrodeposition temperature;
- an accelerator;
- and
- an electrolyte.
A composition for electrodeposition of a metal on a work piece having a first field adjacent a first feature approximately at least 2 μm wide and a second field adjacent a second feature less than 2 μm wide, the composition comprising:
- a metal salt;
- a polymer suppressor formulated for preferential adsorption on the first and second field;
- an accelerator formulated for preferential adsorption on the first and second features;
- and
- an electrolyte,
- wherein the composition is formulated so that the rate of deposition of the metal within the feature is greater than the rate of deposition of the metal on the field.
A method for electrodeposition of a metal on a work piece, the method comprising:
- selecting an electrodeposition temperature;
- formulating an electrochemical deposition composition, said step of formulating comprising combining:
- a metal salt;
- a suppressor having a cloud point;
- if said cloud point is greater than said electrodeposition temperature, an anion added in an amount sufficient to lower said cloud point to approximately no greater than said electrodeposition temperature;
- an accelerator;
- and
- an electrolyte;
- and
- electrodepositing a metal onto said work piece from said electrochemical deposition composition, said electrodepositing occurring at said electrodeposition temperature.
A composition for electrodeposition of a metal on a work piece having a field and a feature, the composition comprising:
- a metal salt;
- a first polymer suppressor;
- an accelerator;
- and
- an electrolyte,
- wherein the composition is formulated so that, upon deposition of a substantially planar film of the metal overlying the work piece, and before any subsequent removal of said metal, the film is no greater than about 3000 angstroms overlying the field.
A method for formulating a composition for electrodeposition of a metal on a work piece, which electrodeposition is conducted at an electrodeposition temperature, the method comprising:
- selecting a suppressor having cloud point;
- combining:
- said suppressor;
- if said cloud point is greater than said electrodeposition temperature, an anion added in an amount sufficient to lower said cloud point to a temperature approximately no greater than the electrodeposition temperature;
- a metal salt;
- an accelerator;
- and
- an electrolyte.
A composition for electrodeposition of a metal film on a work piece, the composition comprising:
- a metal salt;
- a polymer suppressor;
- an accelerator;
- an electrolyte;
- and
- an anion;
- wherein the composition is formulated so that the metal film comprises a surface having no step height greater than 1000 angstroms.
A method for electrodeposition of a metal on a work piece, the method comprising:
- formulating an electrochemical deposition composition, said step of formulating comprising combining:
- a metal salt;
- a suppressor;
- an accelerator;
- an electrolyte;
- and
- an anion;
- and
- electrodepositing a metal film onto said work piece from said electrochemical deposition composition until a substantially planar surface of said metal film is achieved;
- wherein said substantially planar surface is achieved without removal of said metal film.
Dependencies are inferred from the claim text.