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AssigneeSumitomo Electric Industries, Ltd.
InventorsAkira Kuibira, Masuhito Natsuhara, Hirohiko Nakata
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An apparatus for manufacturing a semiconductor or liquid crystal, which is provided, within a reaction chamber 9, a ceramic holder 1 within which is embedded a resistive heating element 3, and a cylindrical support member 2 one end 2a of which supports a ceramic holder 1 and the other end 2b of which is fixed to the reaction chamber 9, wherein one end 2a of the cylindrical support member 2 is hermetically bonded to the ceramic holder 1 whereas a partition plate 6 and a sealing material 7 are used for hermetic sealing on the side of the other end 2b. In this semiconductor or liquid crystal manufacturing apparatus, it is preferable that the space within the cylindrical support member 2 partitioned by the ceramic holder 1 and the partition plate 6 be depressurized to vacuum or to a reduced pressure atmosphere of an inert gas. In the semiconductor or liquid crystal manufacturing apparatus having the above construction, the cylindrical support member can easily be hermetically sealed, corrosion and oxidation of electrode terminals 4 exposed on the rear surface of the ceramic holder can be prevented, the thermal uniformity and thermal efficiency of the holder can be improved, and the length of the cylindrical support member can be reduced, so that reduction of the size of the reaction chamber is possible.
An apparatus for manufacturing a semiconductor or liquid crystal, which is provided, within a reaction chamber to which is supplied a reactive gas, with a ceramic holder which holds a material to be treated on a surface thereof and which is heated by a resistive heating element embedded therein, and with a cylindrical support member one end of which supports the ceramic holder at a surface other than a surface for holding the material to be treated, and the other end of which is fixed to a portion of the reaction chamber, wherein one end of the cylindrical support member and the ceramic holder are hermetically bonded, whereas the other end side of the cylindrical support member is hermetically sealed within the cylindrical support member, and the space within the cylindrical support member defined by the ceramic holder and the sealed portion on the other end side is depressurized either to vacuum or to a reduced-pressure atmosphere of an inert gas.
Dependencies are inferred from the claim text.