Apparatus and method for manufacturing an organic electroluminescence display

An apparatus for manufacturing an organic electroluminescence display, the organic electroluminescence display having a substrate, a first electrode layer formed on the substrate in a predetermined pattern, an organic layer including a plurality of organic material layers stacked on the first electrode layer in a predetermined pattern and a second electrode layer formed on the organic layer, the apparatus comprising:

• an alignment mechanism for aligning a mask, having openings corresponding to the predetermined pattern, to the substrate on which the first electrode layer is formed and for detachably attaching the mask and the substrate;
• a plurality of vacuum processing chambers for sequentially forming a plurality of the organic material layers on the substrate, the substrate being attached to the mask;
• and
• a transferring mechanism for transferring the attached mask and substrate to one of the plurality of vacuum processing chambers to sequentially transfer the attached mask and substrate among the plurality of the vacuum processing chambers.