Method of orientating a template with respect to a substrate in response to a force exerted on the template
AssigneeBoard of Regents, The University of Texas System
InventorsByung Jin Choi, Sidlgata V. Sreenivasan, Stephen C. Johnson
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Abstract
The present invention includes a method of orientating a template with respect to a substrate spaced from the template, the method including, rotating the template about a first and a second axis to orientate the template with respect to the substrate and maintain the orientation in response to a force being exerted upon the template.
Claims23
A method of orientating a template with respect to a substrate spaced from said template, said method comprising:
- rotating said template about a first and a second axis to orientate said template with respect to said substrate and maintain said orientation in response to a force being exerted upon said template.
A method of orientating a template with respect to a substrate spaced from said template, said method comprising:
- rotating said template about a first and a second axis to orientate said template with respect to said substrate and maintain said orientation in response to contact with a material compressed between said template and said substrate.
A method of orientating a template with respect to a substrate spaced from said template, said method comprising:
- rotating said template about a first and a second axis, with first axis independent from said second axis, to orientate said template with respect to said substrate and maintain said orientation in response to a force being exerted upon said template.
Dependencies are inferred from the claim text.