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US 2004/0167239 A1Published application
Methods of forming polymeric structures using carbon dioxide and polymeric structures formed thereby
AssigneesUniversity of North Carolina, North Carolina State University
InventorsJoseph M. DeSimone, Sara Naomi Paisner
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Abstract
Methods of forming a polymeric structure having a plurality of cells therein that include contacting a polymeric material that includes a first phase and a second phase with a composition comprising carbon dioxide to form the polymeric structure having a plurality of cells therein are described. Polymeric materials and microelectronic devices formed by such methods are also described.
Claims20
A polymer structure comprising:
- a polymeric matrix having a plurality of cells therein, wherein the cells in the plurality of cells have an average diameter of from about 1 to 25 nm.
A microelectronic device comprising:
- a dielectric material that comprises a polymeric matrix having a plurality of cells therein, wherein the cells in the plurality of cells have an average diameter of from about 1 to 25 nm.
Dependencies are inferred from the claim text.