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US 2004/0167047 A1Published application
Cleaning solution for substrates of electronic materials
AssigneeKanto Kagaku Kabushiki Kaisha
InventorsNorio Ishikawa, Yumiko Abe, Kiyoto Mori
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Abstract
The present invention relates to a cleaning solution capable of removing efficiently at the same time particles and metallic impurities from a substrate surface without corroding metallic materials. The cleaning solution for cleaning substrates of electronic materials comprises an organic acid compound and at least one selected from the group consisting of dispersants and surfactants.
Claims11
A cleaning solution for cleaning substrates of electronic materials comprising one or more organic acid compounds and at least one selected from the group consisting of dispersants and surfactants.
Dependencies are inferred from the claim text.