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US 2004/0166664 A1Published application
Thin film-structure and a method for producing the same
AssigneeTokyo Institute of Technology
InventorsAkira Shimokohbe, Seiichi Hata
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Abstract
A thin film made of an amorphous material having a supercooled liquid phase region is formed on a substrate. Then, the thin film is heated to a temperature within the supercooled liquid phase region and is deformed by its weight, mechanical external force, electrostatic external force or the like, thereby to form a thin film-structure. Thereafter, the thin film-structure is cooled down to room temperature, which results in the prevention of the thin film's deformation.
Claims5
A method for producing a thin-film structure comprising the steps of:
- forming on a substrate a thin film made of an amorphous matieral having an supercooled liquid phase region,
- heating the thin film to a temperature within the supercooled liquid phase region and thereby deforming the thin film in a given shape, and
- cooling the thin film to room temperature from the temperature within the supercooled liquid phase region to stop deforming the thin film and thereby forming the thin film-structure, wherein the thin film is deformed by its weight to from the thin film-structure.
Dependencies are inferred from the claim text.