Electron beam recorder and electron beam irradiation position detecting method
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsMasahiko Tsukuda, Shinya Abe
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Abstract
An electron beam recorder includes an electron optical system for irradiating an electron beam on a master of an information recording medium and an electron beam irradiation position detecting unit for detecting an irradiation position of the electron beam in the electron optical system while the electron beam is being irradiated on the master by the electron optical system.
Claims13
An electron beam recorder comprising:
- an electron optical system for irradiating an electron beam on a master of an information recording medium;
- and
- an electron beam irradiation position detecting unit for detecting an irradiation position of the electron beam in the electron optical system while the electron beam is being irradiated on the master by the electron optical system.
A method of detecting, in an electron beam recorder for recording signals on a master of an information recording medium by an electron beam, an irradiation position of the electron beam, comprising the steps of:
- irradiating the electron beam on the master so as to record information on the master;
- shielding the irradiated electron beam;
- detecting a quantity of the shielded electron beam;
- and
- detecting a position of the electron beam on the basis of the detected quantity of the electron beam.
A method of detecting, in an electron beam recorder for recording signals on a master of an information recording medium by an electron beam, an irradiation position of the electron beam, comprising the steps of:
- irradiating the electron beam on the master so as to record information on the master;
- detecting an intensity of magnetic field generated about a central axis located at an optical axis of the electron beam;
- and
- detecting a position of the electron beam on the basis of the detected intensity of the magnetic field.
Dependencies are inferred from the claim text.