Coated refractory metal plate having oxide surface layer, and setter which uses the same and which is used in sintering
AssigneeA.L.M.T. Corp.
InventorsYoshitake Fukaya, Hiroshi Yoshida, Masahiro Katoh
Life of this patent
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Abstract
A setter used in sintering and having an oxide coating layer is configured such that oxide powder of at least one of, or a mixture of oxide powders of two or more of alumina, silica, zirconia, yttria, titania, magnesia, and calcia is deposited to at least one surface of a metal composed of molybdenum, tungsten, or an alloy of a molybdenum group and a tungsten group, and a deposition surface thereof allows no exposure of the base material.
Claims36
A refractory metal plate comprising an oxide coating layer formed by depositing oxide powder of at least one of, or a mixture of oxide powders of two or more of alumina, silica, zirconia, yttria, titania, magnesia, and calcia to at least one surface of a metal composed of one of molybdenum, tungsten, and an alloy of a molybdenum group and a tungsten group, wherein said oxide coating layer covers the whole of said at least one surface so as to inhibit exposure of a base material.
A refractory metal plate comprising a plate with an oxide coating layer formed by depositing oxide powder of at least one of, or a mixture of oxide powders of two or more of alumina, silica, zirconia, yttria, titania, magnesia, and calcia to at least one surface of said plate, wherein said plate is a molybdenum plate having a composition of 99.9% or more purity and having a high temperature deformation resistant characteristic, and wherein a size of a disk-shaped crystal grain contained inside said molybdenum plate is such that a ratio of a longer diameter relative to a shorter diameter of a disk surface is four or less, a diameter of a disk surface of said molybdenum plate is 15 mm to 150 mm, and crystal grains account for ⅕ or more of a thickness in a thickness direction of said molybdenum plate.
A refractory metal plate comprising a plate with an oxide coating layer formed by depositing oxide powder of at least one of, or a mixture of oxide powders of two or more of alumina, silica, zirconia, yttria, titania, magnesia, and calcia to at least one surface of said plate, wherein said plate has a composition of 0.1 to 1.0 wt % lanthanum or lanthanum oxides with the remainder composed of molybdenum, has a structure extending in a substantially fixed direction, and is small in deformation amount at a high temperature.
Dependencies are inferred from the claim text.