Thin film-structure and a method for producing the same
AssigneeTokyo Institute of Technology
InventorsAkira Shimokohbe, Seiichi Hata
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Abstract
A thin film made of an amorphous material having a supercooled liquid phase region is formed on a substrate. Then, the thin film is heated to a temperature within the supercooled liquid phase region and is deformed by its weight, mechanical external force, electrostatic external force or the like, thereby to form a thin film-structure. Thereafter, the thin film-structure is cooled down to room temperature, which results in the prevention of the thin film's deformation.
Claims2
A thin film-structure composed of a three-dimensional deformed thin film made of an amorphous material having an supercooled liquid phase region.
Dependencies are inferred from the claim text.