Method of producing silicon nanoparticles from stain-etched silicon powder
AssigneeSI Diamond Technology, Inc.
InventorsYunjun Li, Igor Pavlovsky
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Abstract
The present invention is for a porous silicon powder comprising silicon particles wherein the outermost layers of said particles are porous. The present invention is also directed to a method of making this porous silicon powder using a stain etch method. The present invention is also directed to a method of making silicon nanoparticles from the porous silicon powders using a process of ultrasonic agitation. The present invention also includes methods of processing these silicon nanoparticles for use in a variety of applications.
Claims36
A porous silicon powder comprising a plurality of silicon particles wherein the outermost layers of said particles are porous.
A method for making porous silicon powder comprising the steps of:
- a) providing a quantity of silicon powder comprising a plurality of silicon particles;
- and
- b) etching said silicon particles using a stain-etch process.
A method of making silicon nanoparticles comprising:
- a) providing porous silicon powder;
- and
- b) ultrasonically agitating said powder in a solvent to break up porous outermost layers of silicon particles comprising said powder to provide for a dispersion of silicon nanoparticles in said solvent.
Dependencies are inferred from the claim text.