US 2004/0165923 A1 · Scanning mechanism for high-speed high-resolution scanning

Abstract

A scanning system for use in inspecting or writing on a substrate minimizes vibrations by applying movement-actuating forces directly between a carriage and a countermass which are both free to move along parallel tracks. Forces for decelerating and accelerating the scanning carriage are preferably applied along a minor part of a length of movement of the carriage. The carriage is then isolated from forces applied parallel to the track while moving along a major part of its length of movement. As a result, the carriage travels smoothly with approximately uniform speed during it's operative pass, without suffering from vibrations introduced by direct closed-loop feedback control.

Claims34

Dependent claims

A scanning mechanism for moving a carriage across a substrate for inspecting or writing on the substrate, the scanning mechanism comprising:

(a) a linear track;
(b) a carriage cooperating with said linear track so as to be freely movable along said linear track;
and
(c) a motion reversal arrangement configured to apply force to said carriage when said carriage is moving in a first direction along said linear track so as to stop said carriage and accelerate said carriage in the opposite direction along said linear track,
characterized in that said carriage reversal arrangement is configured to apply said force within two acceleration regions, said two acceleration regions being separated by an intermediate region, said carriage being substantially isolated from forces applied parallel to said track while moving along said track within said intermediate region.

2 more elements

Dependencies are inferred from the claim text.

Scanning mechanism for high-speed high-resolution scanning

Life of this patent

Scanning mechanism for high-speed high-resolution scanning

Life of this patent

Abstract

Claims34