Light-receiving element, manufacturing method for the same, optical module, and optical transmitting device
AssigneeSeiko Epson Corporation
InventorsTsuyoshi Kaneko, Hajime Onishi
Life of this patent
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Abstract
To provide a light-receiving element that is capable of high-speed operation and includes an optical element with controlled setting position, shape and size, a manufacturing method for the light-receiving element, and an optical module and an optical transmitting device including the light-receiving element, a light-receiving element includes a base member provided over a light-receiving surface, and an optical element provided on a top surface of the base member.
Claims27
A light-receiving element, comprising:
- a base member provided over a light-receiving surface;
- and
- an optical element provided on the top surface of the base member.
A light-receiving element, comprising:
- a columnar part provided on a semiconductor substrate;
- a light-receiving surface provided on the top surface of the columnar part;
- a base member provided over the light-receiving surface;
- and
- an optical element provided on the top surface of the base member.
A light-receiving element, comprising:
- a columnar part provided on a semiconductor substrate;
- a light-receiving surface provided on the back surface of the semiconductor substrate;
- a base member provided over the light-receiving surface;
- and
- an optical element provided on the top surface of the base member.
A method of manufacturing a light-receiving element, comprising:
- (a) forming a base member over a light-receiving surface;
- (b) forming an optical element precursor by discharging droplet to the top surface of the base member;
- and
- (c) forming an optical element by curing the optical element precursor.
Dependencies are inferred from the claim text.