Compensation and/or variation of wafer level produced lenses and resultant structures

An array of micro-optical components comprising;

• at least two micro-optical components, each micro-optical component comprising
• a refractive surface created to have a designed optical performance, and
• a corresponding compensation surface for said refractive surface, said corresponding compensation surface including a corresponding compensation feature when said refractive surface deviates from the designed optical performance, said micro-optical component providing the designed optical performance,
• at least two refractive surfaces of the array of micro-optical components being formed to have the designed optical performance, the array of micro-optical components including at least one corresponding compensation feature, at least two compensation surfaces of the array of micro-optical components being different from one another, wherein corresponding compensation features comprise a corresponding separation of the corresponding compensation surface from the refractive surface in accordance with an intended focal length of the combination of the refractive surface and the corresponding compensation surface.

An array of micro-optical components comprising;

• at least two micro-optical components, each micro-optical component comprising
• a refractive surface created to have a designed optical performance, and
• a corresponding compensation surface for said refractive surface, said corresponding compensation surface including a corresponding compensation feature when said refractive surface deviates from the designed optical performance, said micro-optical component providing the designed optical performance,
• at least two refractive surfaces of the array of micro-optical components being formed to have the same designed optical performance, the array of micro-optical components including at least one corresponding compensation feature, at least two compensation surfaces of the array of micro-optical components being different from one another, wherein corresponding compensation features include a diffractive element.

A method of forming micro-optical components having a desired optical performance comprising:

• creating a plurality of refractive surfaces on a substrate, each refractive surface created to have a designed optical performance;
• providing a corresponding plurality of compensation surfaces, one for each refractive surface;
• measuring an optical performance of at least one refractive surface of said refractive surfaces;
• comparing measured optical performance with the designed optical performance;
• forming a compensation profile on a compensation surface when a corresponding refractive surface deviates from the designed optical performance;
• creating refractive surface-compensation surface pairs, each pair having the designed optical performance;
• and
• separating the plurality of pairs into at least two micro-optical components, each micro-optical component including a refractive surface and a compensation surface.