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US 2004/0165811 A1Published application
Method and apparatus facilitating mechanical beam steering for optical integrated circuits
AssigneeLightwave Microsystems Corporation
InventorsRobert Cole, Michael Guerrero,, Kenneth Purchase, Anthony J. Ticknor, Kenneth McGreer, David Menche
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Abstract
Actuators facilitating mechanical beam steering for optical integrated circuits are disclosed. The mechanical beam steering can mitigate thermal sensitivity of optical circuits, for example, arrayed waveguides. Also disclosed are methods for fabricating optical integrated circuits employing actuators.
Claims22
An actuator for an optical integrated circuit, comprising:
- a first actuator body part having a first coefficient of thermal expansion;
- a second actuator body part having a second coefficient of thermal expansion, the second actuator body part coupled to the first body part.
An optical integrated circuit, comprising:
- a first region having a waveguide;
- a second region having a waveguide;
- a lens coupled to the first region and the second region, the lens optically coupling the waveguide of the first region to the waveguide of the second region;
- and,
- an actuator located adjacent to the first region.
2 more elements
A method of making an optical integrated circuit, comprising:
- providing a base having at least one waveguide in a first region and at least one waveguide in a second region;
- providing a connecting region between the first region and the second region;
- providing a first lens in the connecting region;
- scroll dicing the first region from the second region;
- and
- providing an actuator between the first region and the second region.
3 more elements
Dependencies are inferred from the claim text.