Coaxial narrow angle dark field lighting
AssigneeElectro Scientific Industries, Inc.
InventorLeo Baldwin
Life of this patent
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AssigneeElectro Scientific Industries, Inc.
InventorLeo Baldwin
Estimating the term…
A coaxial narrow angle dark field imaging system is provided. The system utilizes a telecentric lens to illuminate objects with symmetric coaxial narrow angle dark field illumination. The illumination technique is particularly suited to highlight minor features or defects on planar specular objects. In particular, the coaxial light source directs light rays towards a telecentric lens which redirects the light rays towards the substantially planar specular object. The light rays are reflected back through the telecentric lens towards a camera. To the extent that the light rays are reflected from a planar specular portion of the object the light rays are blocked by a telecentric stop. Light rays reflected from a defect or feature in the planar specular object will pass through an aperture in the stop to a camera.
An imaging system for imaging a defect on a planar specular object comprising:
An imaging system for imaging a defect on a planar specular object comprising:
Dependencies are inferred from the claim text.