Magnetic read and write head with NiFeCo-O-N or NiFeCo-N shield and/or poles
AssigneeInternational Business Machines Corporation
InventorJohn David Westwood
Life of this patent
Estimating the term…
Abstract
A specified amount of N2O or N2 is employed in a process gas of a DC magnetron for sputter depositing single or laminated films of NiFeCo—O—N or NiFeCo—N with a high uniaxial anisotropy HK after annealing these films along their hard axes. The films can be used for shield layers and/or pole piece layers in a magnetic head.
Claims40
A magnetic head assembly, which has an air bearing surface (ABS), comprising:
- a spin valve sensor, nonmagnetic first and second read gap layers, a ferromagnetic first shield layer and a ferromagnetic first pole piece layer;
- the spin valve sensor being located between the first and second read gap layers and the first and second read gap layers being located between the first shield layer and the first pole piece layer;
- the spin valve sensor having a pinned layer which has a magnetic moment that is pinned by a pinning layer in a direction perpendicular to the ABS;
- a ferromagnetic second pole piece layer and a nonmagnetic write gap layer wherein the second pole piece layer is separated from the first pole piece layer by the write gap layer at the ABS and is connected to the first pole piece layer at a back gap;
- each of the first shield layer and the first and second pole piece layers having a magnetic easy axis that is directed parallel to the ABS;
- an insulation stack with a coil layer embedded therein located between the first and second pole piece layers wherein the insulation stack includes at least one baked photoresist insulation layer that has been formed in part by heating at a preselected annealing temperature in the presence of a magnetic field that is directed perpendicular to said ABS;
- the insulation stack having been formed subsequent to said sensor and at least the first pole piece layer having not been subjected to annealing in the presence of a magnetic field directed parallel to said ABS before said heating of the layer of the insulation stack;
- and
- at least one of the first and second shield layers and the first and second pole piece layers comprising NiFeCo—O—N or NiFeCo—N.
A magnetic disk drive including a magnetic head assembly having an air bearing surface (ABS), the disk drive comprising:
- the magnetic head assembly including:
- a spin valve sensor, first and second nonmagnetic first and second read gap layers, a ferromagnetic first shield layer and a ferromagnetic first pole piece layer;
- the spin valve sensor being located between the first and second read gap layers and the first and second read gap layers being located between the first shield layer and the first pole piece layer;
- the spin valve sensor having a pinned layer which has a magnetic moment that is pinned by a pinning layer in a direction perpendicular to the ABS;
- a ferromagnetic second pole piece layer and a write gap layer wherein the second pole piece layer is separated from the first pole piece layer by the write gap layer at the ABS and is connected to the first pole piece layer at a back gap;
- each of the first shield layer and the first and second pole piece layers having an easy axis that is directed parallel to the ABS;
- an insulation stack with a coil layer embedded therein located between the first and second pole piece layers wherein the insulation stack includes at least one baked photoresist insulation layer that has been formed in part by heating at a preselected annealing temperature in the presence of a magnetic field that is directed perpendicular to said ABS;
- and
- the insulation stack having been formed subsequent to said sensor and at least the first pole piece layer having not been subjected to annealing in the presence of a magnetic field directed parallel to the ABS before said heating of the layer of the insulation stack;
- and
- at least one of the first and second shield layers and the first and second pole piece layers comprising NiFeCo—O—N or NiFeCo—N;
- a housing;
- a magnetic disk rotatably supported in the housing;
- a support mounted in the housing for supporting the magnetic head with its ABS site facing the magnetic disk so that the magnetic head is in a transducing relationship with the magnetic disk;
- spindle motor for rotating the magnetic disk;
- an actuator means connected to the support for moving the magnetic head to multiple positions with respect to said magnetic disk;
- and
- a processor connected to the magnetic head, to the spindle motor and to the actuator for exchanging signals with the magnetic head, for controlling movement of the magnetic disk and for controlling the position of the magnetic head.
A method of making a magnetic layer with in-plane anisotropy and high HK after hard axis annealing in the presence of a field perpendicular to the plane comprising the steps of:
- providing a DC magnetron which has a chamber, a target and a substrate;
- the target being NiFeCo;
- providing a first process gas in the chamber which is composed of an inert gas and a nitrogen containing gas;
- and
- sputtering the target to form said magnetic layer composed of NiFeCo—O—N or NiFeCo—N on the substrate.
Dependencies are inferred from the claim text.