Microsuspension assemblies for direct access storage devices
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorJeffrey S. Lille
Life of this patent
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Abstract
Embodiments include a method for forming a head suspension assembly. A spacer layer is formed in or on a silicon wafer. A transfer film including an opening defining the shape of a slider support membrane is provided, and the opening is filled with a resin material. The transfer film with the resin material therein is positioned over the silicon wafer so that at least a portion of the resin material is positioned adjacent to the spacer layer. The resin material is baked to form a glassy carbon material. The spacer layer is etched to form a trench in the silicon wafer adjacent to the glassy carbon material, and a slider is positioned on the glassy carbon material over the trench.
Claims18
A head suspension assembly comprising:
- a suspension arm having a trench formed therein;
- and
- a membrane positioned on the suspension arm and adapted to support a slider thereon, wherein at least a portion of the membrane is positioned adjacent to the trench.
A head suspension assembly comprising:
- a suspension arm having a opening extending a distance therein;
- and
- a membrane positioned on the suspension arm and adapted to support a slider thereon, wherein a portion of the membrane is positioned over the opening.
A disk drive for reading and writing disks, the disk drive including a head suspension assembly, the disk drive comprising:
- at least one disk;
- a rotatable hub for mounting the disk;
- a read/write head adapted to read from and write to the disk;
- a slider onto which the read/write head is provided;
- and
- a suspension assembly adapted to support the slider, the suspension assembly including a support arm defining a cavity, and a membrane positioned on the support arm, wherein at least a portion of the membrane is positioned adjacent the cavity.
Dependencies are inferred from the claim text.