Multi-tilt micromirror systems with concealed hinge structures
AssigneeExajoule LLC
InventorChristopher M. Aubuchon
Life of this patent
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Abstract
Multi-tilt mirrors, assemblies and applications of the same, and methods of making. Micromirror devices employing a superstructure that includes a mirror supported over a hinge set above a substructure. Various features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable optics solutions.
Claims59
A micromirror device comprising:
- a substrate with electrical components including address circuitry;
- a micromirror;
- and
- a unitary support structure interconnecting said substrate and said micromirror, said support structure including a first torsion member mounted at two locations on said substrate and a second torsion member mounted to opposite ends of said micromirror, said torsion members configured to permit rotation of said micromirror about multiple axes of rotation.
A micromirror device comprising:
- a substrate with electrical components including address circuitry;
- a micromirror;
- and
- a support structure underlying said micromirror and joining said substrate with said micromirror, said support structure including a first torsion component having first and second ends mounted to said substrate and a second torsion component having first and second ends mounted to opposite ends of said micromirror, said first and second torsion components intersecting one another to provide a universal joint configured to permit rotation of said micromirror about multiple axes of rotation.
A micromirror assembly, comprising:
- a substrate with electrical components including address circuitry;
- and
- a plurality of micromirror devices each including a micromirror, at least one of said micromirror devices comprising a unitary support structure interconnecting said substrate and said micromirror, said support structure including a first torsion member mounted to said substrate at two locations and a second torsion member mounted to opposite ends of said micromirror, said torsion members configured to permit rotation of said micromirror about multiple axes of rotation.
An optical switching mechanism, comprising:
- a first array of optical reflectors adapted to receive and reflect optical signals from at least one optical input source;
- and
- a second array of optical reflectors adapted to receive optical signals reflected from said first array of optical reflectors and reflect the optical signals toward at least one optical output;
- at least one of said optical reflectors comprising an assembly of micromirror devices;
- at least one of said micromirror devices being adapted for three dimensional orientation.
Dependencies are inferred from the claim text.