Back to results
US 2004/0165249 A1Published application
Micromirror systems with concealed multi-piece hinge structures
AssigneeExajoule LLC
InventorChristopher M. Aubuchon
Life of this patent
Estimating the term…
Abstract
Micromirror systems with concealed multi-piece hinge structures are provided for reflective applications. Generally, light is reflected by these structures adapted for three-dimensional tilt as well as up-and-down or out-of-plane actuation. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable solutions for use in optical switching, projection and other applications, especially optical applications.
Claims41
A micromirror device comprising:
- a substrate with electrical components including address circuitry;
- a micromirror;
- and
- a support structure underlying said micromirror and interconnecting said substrate and said micromirror, said support structure including at plurality of deflection members, each deflection member mounted to said substrate and said micromirror, and configured to permit rotation of said micromirror about multiple axes of rotation and drawing said micromirror toward said substrate.
1 more element
Dependencies are inferred from the claim text.