Spherical light-scatter and far-field phase measurement
OwnerRaymond J. Castonguayinventor
Life of this patent
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Abstract
A far-field measurement instrument has multiple imaging lenses cut into a pentagon shape and arranged in geodesic spherical configuration with a common field of view focused on the source of the scattered light to be measured. Aspheric lenses are used to facilitate collimation of large incident angles of scattered light. A measurement module, such as a camera, is used behind each lens. The measurement module may consist of an interferometer or Shack-Hartman wavefront sensor, thereby enabling the measurement of both intensity and phase of the scattered light.
Claims29
A device for measuring light propagated from a point source on a sample surface, comprising:
- a stage for holding the sample surface;
- a plurality of multi-pixel sensors adapted to measure intensity values of light fractions propagated radially from said point source on the sample surface;
- and
- an optical system for collimating a predetermined portion of said light fractions toward one of the plurality of multi-pixel sensors so that each of said portions of light fractions is received by a corresponding set of pixels in said one of the plurality of multi-pixel sensors.
A device for measuring light scattered radially from a point source on a sample surface, comprising:
- a substantially hemispherical structure defining an equatorial plane;
- a stage for holding the sample surface at a position substantially on said equatorial plane;
- a test light source adapted to illuminate the sample surface at a predetermined angle of incidence;
- and
- a plurality of multi-pixel sensors adapted to measure intensity values of light fractions scattered radially toward discrete portions of an interior surface of the substantially hemispherical structure.
Dependencies are inferred from the claim text.