US 2004/0165036 A1 · Bubble-jet type ink-jet print head and manufacturing method thereof

Abstract

A bubble-jet type ink jet printhead and manufacturing method thereof are provided. In the printhead, a manifold for supplying ink and a concave ink chamber is integrated with a substrate by being recessed from the same surface of the substrate, and a nozzle palate on the substrate in which a nozzle is formed and a round-shaped heater surrounding the nozzle are integrated without a complex process such as bonding. Thus, this simplifies the manufacturing procedure and facilitates high volume production. Furthermore, the round-shaped heater forms a doughnut-shaped bubble to eject ink, thereby preventing a back flow of ink as well as formation of satellite droplets which may degrade image resolution.

Claims22

Dependent claims

A bubble-jet type ink jet printhead, comprising:

a substrate integrated with a manifold for supplying ink and an ink chamber connected with the manifold for containing ink to be ejected, said manifold and said ink chamber being are recessed from the same surface of the substrate;
a nozzle plate located on a top surface of said substrate to cover the manifold and the ink chamber, said nozzle plate being perforated by a nozzle hole located directly above a center portion of said ink chamber;
a heater surrounding the nozzle hole on the nozzle plate;
and
electrodes electrically connected with the heater for applying current to the heater, wherein said ink chamber is substantially concave.

2 more elements

A method of manufacturing a bubble-jet type ink jet printhead, the method comprising the steps of:

forming an insulating layer on the surface of a substrate;
forming a round-shaped heater on the insulating layer;
forming electrodes electrically connected with the round-shaped heater on the insulating layer;
etching said insulating layer to form a opening for an ink chamber and an opening for a manifold, said opening for said ink chamber having a diameter less than that of said round-shaped heater and being located inside said round-shaped heater, said opening for said manifold being located outside said round-shaped heater;
etching said substrate using said insulating layer having said openings as an etch mask to form an ink chamber having a diameter greater than that of the round-shaped heater wherein said ink chamber resulting in a concave shape, and said manifold;
and
depositing a protective layer over said insulating layer, said protective layer covering said opening for said manifold, said protective layer being perforated by a hole, said hole overlapping said opening in said insulating layer for said ink chamber producing a nozzle hole.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

10/663,796Filed 17 Sep 2003

Priority

KR 00-4174720 Jul 2000

Published

26 Aug 2004

Term ends

Not estimatedThe source records don’t support an estimate.

Classification12 codes

B41J 2/1601
Production of nozzles: production of bubble jet print heads
B41J 2/1404
Structure of the pressure chamber: geometrical characteristics
B41J 2/14072
Structure of bubble jet print heads: electrical connections, e.g. details on electrodes, connecting the chip to the outside...
B41J 2/14137
Resistive element: resistor surrounding the nozzle opening

Bubble-jet type ink-jet print head and manufacturing method thereof

Life of this patent

Bubble-jet type ink-jet print head and manufacturing method thereof

Life of this patent

Abstract

Claims22