Magnetic inductor core and inductor and methods for manufacturing same
AssigneeGeorgia Tech Research Corporation
InventorsJin-Woo Park, Paul Floretn Cros, Mark Allen, Yong Kyu Yoon
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Abstract
A highly-laminated magnetic inductor core and integrated inductor, and methods for making the same are disclosed. A representative method for manufacturing a highly-laminated magnetic inductor core includes: depositing at least a first layer of a ferromagnetic material; depositing at least a first layer of a sacrificial conductive material; depositing a support structure formed of a ferromagnetic material; and removing the sacrificial conductive material, thereby leaving the at least first layer of ferromagnetic material mechanically supported by the support structure.
Claims24
A method for manufacturing a highly-laminated magnetic inductor core, the method comprising:
- depositing at least a first layer of a ferromagnetic material;
- depositing at least a first layer of a sacrificial conductive material;
- depositing a support structure formed of a ferromagnetic material;
- and
- removing the sacrificial conductive material, thereby leaving the at least first layer of ferromagnetic material mechanically supported by the support structure.
A method for manufacturing an integrated inductor, the method comprising:
- micro-molding and electroplating a conductive material atop a substrate to form a bottom portion of a conductor coil;
- depositing and patterning a layer of photosensitive epoxy atop the bottom portion of the conductor coil;
- sequentially electrodepositing at least a first layer of a ferromagnetic material and at least a first layer of a sacrificial conductive material atop the photosensitive epoxy;
- electrodepositing a support structure formed of a ferromagnetic material;
- selectively etching the sacrificial conductive material, thereby leaving the at least first layer of ferromagnetic material mechanically supported by the support structure which forms a magnetic core for the integrated inductor;
- depositing a layer of epoxy resist over the magnetic core;
- patterning the epoxy resist to form vertical electrical vias for the vertical portions of the conductor coil;
- depositing a layer of photoresist over the epoxy resist;
- patterning the photoresist to form horizontal spaces for a top portion of the conductor coil;
- and
- electrodepositing a conductive material filling the vertical electrical vias and the horizontal spaces, thus forming the conductor coil integrally wrapped around the magnetic core.
A magnetic inductor core comprising:
- a first stack of ferromagnetic layers spaced apart a first predetermined distance;
- a second stack of ferromagnetic layers spaced apart a second predetermined distance;
- and
- a ferromagnetic support structure mechanically supporting the first and second stack.
An integrated inductor comprising:
- a magnetic inductor core comprising:
- a first stack of ferromagnetic layers spaced apart a first predetermined distance;
- a second stack of ferromagnetic layers spaced apart a second predetermined distance;
- and
- a ferromagnetic support structure mechanically supporting the first and second stack;
- and
- an integrated conductor coil microfabricated around the magnetic inductor core.
Dependencies are inferred from the claim text.