Micro-electromechanical inductive switch
AssigneeInternational Business Machines Corporation
InventorsRichard P. Volant, John E. Florkey, Robert A. Groves
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AssigneeInternational Business Machines Corporation
InventorsRichard P. Volant, John E. Florkey, Robert A. Groves
Estimating the term…
A micro-electromechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described. The inductive MEM switch consists of a first plurality of coils on a moveable platform and a second plurality of coils on a stationary platform or substrate, the coils on the moveable platform being above or below those in the stationary substrate. Coupling and decoupling occurs by rotating or by laterally displacing the coils of the moveable platform with respect to the coils on the stationary substrate. Diverse arrangements of coils respectively on the moveable and stationary substrates allow for a multi-pole and multi-position switching configurations. The MEM switches described eliminate problems of stiction, arcing and welding of the switch contacts. The MEMS switches of the invention can be fabricated using standard CMOS techniques.
A semiconductor micro-electromechanical (mem) switch comprising:
A MEM switch on a stationary substrate comprising:
A MEM switch comprising:
A MEM switch comprising:
A semiconductor multi-pole inductive MEM switch comprising:
The semiconductor multi-pole inductive MEM switch as recited in claim 13, wherein said inductors form either a single closed loop or a spiral of consisting of multiple loops.
A semiconductor inductive MEM switch comprising:
A semiconductor inductive MEM switch comprising:
The semiconductor inductive MEM switch as recited in claim 16 wherein said rotating platform is attached to a pivot pin on or about the center of gravity of said rotating platform, said pivot pin being anchored on said stationary substrate.
A semiconductor MEM switch-switch combination comprising:
Dependencies are inferred from the claim text.