Voltage-applying probe, apparatus for manufacturing electron source using the probe, and method for manufacturing electron source using the apparatus
AssigneeCanon Kabushiki Kaisha
InventorsAkihiro Kimura, Kazuhiro Oki, Shigeto Kamata
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Abstract
A probe for applying a voltage to lines provided on a substrate comprises (a) a conductive sheet, the conductive sheet including a mesh sheet in which linear members are woven into a mesh and a conductive material which coats the mesh sheet, (b) an elastic member for pressing the conductive sheet against the lines, and (c) a holding member for holding the conductive sheet and the elastic member together. The probe has improved electrical connectivity and durability, and achieves a reduction in size and facilitation of operations of an apparatus for manufacturing an electron source.
Claims12
A probe for applying a voltage to electrically conductive lines formed on a substrate, the probe comprising:
- a conductive sheet, arranged for making contact with the lines formed on the substrate, the conductive sheet comprising a mesh sheet in which linear members are woven into a mesh and a conductive material which coats the mesh sheet;
- an elastic member, arranged for pressing the conductive sheet against the lines;
- and
- a holding member, arranged for holding the conductive sheet and the elastic member together.
Dependencies are inferred from the claim text.