Method for forming permanent magnet targets for position sensors
AssigneeDelphi Technologies, Inc.
InventorsThaddeus Schroeder, Shih-Chia Chang, Lorenzo Guadalupe Rodriguez
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Abstract
A process for forming magnetic targets for position and speed sensors, and magnetic targets formed according to the process. The targets are formed on a conductor-clad substrate by first applying a layer of photoresist material and then patterning and etching the photoresist to form trenches defining the shape and dimensions of the targets. Magnetic material is formed in the trenches and magnetized to form the targets.
Claims34
A method for forming a target comprising a magnetic target track on a substrate, comprising:
- forming a conductive layer on the substrate;
- disposing a photoresist layer over the conductive layer;
- forming at least one trench in the photoresist layer, wherein the at least one trench is in the shape of the magnetic target track;
- forming magnetic material in the trench;
- and
- magnetizing the magnetic material to form the magnetic target track.
A method for forming a target comprising a magnetic target track on a substrate, wherein the substrate comprises an underlying dielectric layer and an overlying conductive layer, said method comprising:
- patterning the conductive layer by removing certain regions of the conductive layer, wherein the remaining regions form patterned conductive regions;
- forming magnetic material on the patterned conductive regions;
- and
- magnetizing the magnetic material to form the magnetic target track.
A method for forming a target comprising a magnetic target track on a substrate, comprising:
- forming a magnetic layer on the substrate;
- and
- patterning the magnetic layer to form at least one target therein.
A method for forming a target comprising a magnetic target track on a substrate, comprising:
- forming a magnetic layer on a substrate;
- forming a photoresist layer over the magnetic layer;
- patterning the photoresist layer to form at least one mesa region therein;
- removing the magnetic layer except in the regions underlying the at least one mesa region;
- and
- wherein the magnetic material underlying the mesa region forms the magnetic target track
A magnetic target comprising a magnetic target track for a position sensor, comprising:
- a substrate;
- a conductive layer overlaying said substrate;
- a dielectric layer overlaying said conductive layer, wherein said dielectric layer includes one or more trenches in the shape of a target track;
- and
- magnetic material in the trench such that the material-filled trench forms the magnetic target track.
27 The magnetic target of claim 26 wherein the conductive layer comprises copper.
A magnetic target comprising a magnetic target track for a position sensor, comprising:
- a substrate;
- and
- a patterned magnetic layer overlying said substrate, wherein said patterned magnetic layer forms said magnetic target track.
A magnetic target for a position sensor, comprising:
- a substrate;
- a patterned conductive layer overlying said substrate;
- a magnetic layer formed over said patterned conductive layer.
A position sensor comprising:
- a moving target having magnetic material formed therein;
- a magnetic field sensor for sensing the magnetic field created by the magnetic material and for detecting motion of the moving target based thereon.
Dependencies are inferred from the claim text.