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US 2004/0164371 A1Published application
Micro electromechanical systems thermal switch
AssigneeHoneywell International Inc.
InventorJoon-Won Kang
Life of this patent
Estimating the term…
Abstract
A Micro Electro-Mechanical Systems (MEMS) thermal switch. The switch includes a FET having a source and drain in a substrate and a beam isolated from the substrate. The beam is positioned over the source and the drain and spaced by a predefined gap. When the thermal set point is reached, the beam moves to electrically connect the source to the drain.
Claims21
A thermal switch comprising:
- a FET having a source and drain in a substrate;
- and
- a beam isolated from the substrate and positioned over the source and the drain and spaced by a predefined gap.
A method of fabricating a thermal switch, comprising:
- providing a silicon substrate;
- applying a photoresist;
- masking the photoresist according to a source and drain mask;
- etching the photoresist according to the photoresist mask;
- implanting at least one of N-type or P-type doped material into the substrate;
- removing the photoresist;
- applying an insulating layer;
- masking the insulating layer according to a predefined insulating mask;
- etching the insulating layer according to the insulating mask;
- applying a sacrificial layer;
- masking the sacrificial layer according to a predefined sacrificial layer mask;
- etching the sacrificial layer based on the applied sacrificial layer mask;
- applying a beam material;
- masking the beam material according to a predefined beam mask;
- etching the beam material based on the beam mask;
- and
- removing the sacrificial layer.
14 more elements
A thermal switch comprising:
- a substrate having a source and a drain separated by a predefined gap;
- and
- a connection means isolated from the substrate and positioned over the source and the drain for allowing current between the source and drain at a predefined temperature.
Dependencies are inferred from the claim text.