Gallium arsenide HBT having increased performance and method for its fabrication
AssigneeSkyworks Solutions, Inc.
InventorsPeter J. Zampardi, Kevin Choi, Lance G. Rushing
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AssigneeSkyworks Solutions, Inc.
InventorsPeter J. Zampardi, Kevin Choi, Lance G. Rushing
Estimating the term…
According to one exemplary embodiment, a gallium arsenide heterojunction bipolar transistor comprises a collector layer and a first spacer layer situated over the collector layer, where the first spacer layer is a high-doped P+ layer. For example, the first spacer layer may comprise GaAs doped with carbon. The gallium arsenide heterojunction bipolar transistor further comprises a base layer situated over the first spacer layer. The base layer may comprise, for example, a concentration of indium, where the concentration of indium is linearly graded in the base layer. The base layer may comprise InGaAsN, for example. The gallium arsenide heterojunction bipolar transistor further comprises an emitter layer situated over the base layer. The emitter layer may comprise, for example, InGaP.
A gallium arsenide heterojunction bipolar transistor, said transistor comprising:
A method for fabricating a gallium arsenide heterojunction bipolar transistor, said method comprising steps of:
A gallium arsenide heterojunction bipolar transistor, said transistor comprising:
Dependencies are inferred from the claim text.