Reticle position detection system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorMing-Yu Fan
Life of this patent
Estimating the term…
Abstract
A reticle position detection system which detects an abnormal position of a reticle in order to prevent damage to the reticle by a reticle fork or pre-alignment unit used to orient the reticle for subsequent internalization into a process tool or other equipment. The reticle position detection system includes a laser beam generator provided on one side of the reticle and a laser beam sensor provided on the opposite side of the reticle. The laser beam generator emits a laser beam which is received by the laser beam sensor in the event that the reticle is correctly positioned for engagement by a reticle fork or pre-alignment unit.
Claims20
A system for detecting a position of a reticle with respect to a plane, comprising:
- a laser beam generator and a laser beam sensor provided in spaced-apart relationship to each other for receiving the reticle there between;
- and
- wherein said laser beam generator is adapted for emitting a laser beam for interception by said laser beam sensor when the reticle is disposed in the plane and for reflection from the reticle and missing said laser beam sensor when the reticle deviates from the plane.
A system for detecting a position of a reticle in a reticle pod with respect to a plane, comprising:
- a pod support surface for receiving the reticle pod;
- a laser beam sensor carried by said pod support surface;
- a laser beam generator carried by said pod support surface in spaced-apart relationship to said laser beam sensor, with the pod support surface adapted for receiving the reticle pod between said laser beam sensor and said laser beam generator;
- and
- wherein said laser beam generator is adapted for generating a laser beam for interception by said laser beam sensor when the reticle is disposed in the plane and reflection from the reticle and missing said laser beam sensor when the reticle deviates from the plane.
A method of detecting a position of a reticle in a reticle pod with respect to a plane, comprising the steps of:
- providing a pod support surface;
- providing a laser beam generator on said pod support surface;
- providing a laser beam sensor on said pod support surface in spaced-apart relationship to said laser beam generator;
- placing the reticle pod on said pod support surface between said laser beam generator and said laser beam sensor;
- emitting a laser beam from said laser beam generator to said laser beam sensor when the reticle is disposed in the plane;
- and
- reflecting the laser beam from the reticle away from said laser beam sensor when the reticle deviates from the plane.
Dependencies are inferred from the claim text.