Scanning electron microscope with measurement function
AssigneesHitachi High-Technologies Corporation, Hitachi Science Systems, Ltd.
InventorsYuuki Ojima, Katsuhiro Sasada, Kazuhiro Ueda, Tsuyoshi Morimoto
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Abstract
A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
Claims7
A scanning electron microscope with a measurement function, wherein:
- plural measurement items including plural measurement calculation methods for an edge detected by an edge detection are specified in an auto measurement parameter (AMP) configuration window;
- a line profile is created from an SEM image;
- an edge is detected from the line profile as specified;
- and
- measurements are calculated successively from the detected edge according to specified plural measurement calculation methods.
A scanning electron microscope with a measurement function, wherein:
- plural measurement items including plural measurement calculation methods for an edge detected by an edge detection are specified in an auto measurement parameter configuration window;
- a line profile is created from an SEM image;
- an edge is detected from the line profile as specified;
- and successive calculations of measurements from the detected edge are repeated for the specified measurement items;
- and
- measurement values calculated for measurement items including plural measurement calculation methods for an edge detection method are displayed in a display window.
A scanning electron microscope with a measurement function, wherein:
- plural measurement items including plural measurement calculation methods for an edge detected by an edge detection are specified in an auto measurement parameter configuration window;
- a line profile is created from an SEM image;
- an edge is detected from the line profile as specified;
- for the specified measurement items, measurements are calculated from the detected edge;
- after plural measurements are calculated for each edge detection method, edge detection from the line profile is done for a next edge detection method;
- plural measurements are calculated from an edge detected for another measurement item;
- and
- measurement values calculated for plural measurement items are displayed in a display window.
A scanning electron microscope with a measurement function, wherein:
- plural measurement items including plural measurement calculation methods for an edge detected by an edge detection are specified in an auto measurement parameter configuration window;
- a line profile is created from an SEM image;
- an edge is detected as specified from the line profile;
- and
- for the specified measurement items, measurements are calculated from the detected edge.
Dependencies are inferred from the claim text.