Plasma-enhanced film deposition

A method for depositing films onto substrates, the method comprising:

• a) providing a film-deposition apparatus comprising a deposition chamber having a substrate-coating region and an electrode-cleaning region, a rotatable electrode positioned in the deposition chamber and having an interior cavity, and first and second magnet systems disposed in said interior cavity;
• b) establishing in the substrate-coating region a first gaseous atmosphere comprising a precursor gas;
• c) establishing in the electrode-cleaning region a second gaseous atmosphere comprising a sputtering gas;
• d) delivering a charge to the electrode, thereby creating in the first gaseous atmosphere plasma that is held by the first magnet system in a first plasma confinement and creating in the second gaseous atmosphere plasma that is held by the second magnet system in a second plasma confinement, the precursor gas being chemically reacted and/or decomposed in the first plasma confinement;
• and
• e) positioning a substrate in the substrate-coating region and exposing the substrate to the chemically-reacting and/or decomposing precursor gas in the first plasma confinement such that coating is formed on the substrate.