Cylindrical magnetron with self cleaning target
AssigneeVon Ardenne Anlagentechnik GmbH
InventorsJames G. Rietzel, Kevin D. Johnson
Life of this patent
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Abstract
A cylindrical magnetron capable of running at high current and voltage levels with a target tube that is self cleaning not only in the center portion, but also at the ends. Sputtering the ends of the target tube virtually eliminates accumulation of condensate at the ends and any resultant arcing, resulting in a more reliable magnetron requiring less service and a magnetron that produces more consistent coatings.
Claims24
A magnetron having endblocks, the magnetron comprising:
- a cylindrical target tube comprising a material to be sputtered onto a substrate, a portion of the target tube within the endblocks and an exposed portion without the endblocks;
- support structures located at the ends of the target tube that position the target tube and supply cooling water and power to the target tube;
- and
- a magnetic structure within the target tube, the magnetic structure having a magnetic field that extends the length of the exposed portion of the target tube.
A cylindrical magnetron comprising:
- a cylindrical target tube comprising a material to be sputtered onto a substrate;
- support structures located at the ends of the target tube that position the target tube and supply cooling water and power to the target tube;
- a magnetic array within the target tube, the magnetic array positioned within the target tube such that the target tube is self cleaning.
A magnetron comprising:
- a target tube;
- means for supporting the target tube;
- means for rotating the target tube;
- means for sputtering material from the target tube along the entire exposed length of the target tube.
A method for preventing arcing in a magnetron, improving the coatings deposited upon a substrate, and increasing the efficiency of the magnetron, the method comprising:
- providing a cylindrical target tube, the target tube having a length;
- providing a magnet having a magnetic field;
- positioning the magnet within the target tube such that the magnetic field extends along the length of the target tube and such that the center and the ends of the target tube are sputtered during sputtering operations.
A cylindrical target tube comprising a material to be sputtered onto a substrate and a magnetic array within the target tube, the target tube clamped at the ends to support structures, the magnetic array positioned within the target tube such that the entire unclamped portion of target tube is sputtered.
A cylindrical magnetron with a target tube that is self cleaning not only in the center portion, but also at the ends.
Dependencies are inferred from the claim text.