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US 2004/0163765 A1Published application
Plasma reactor for manufacturing electronic components
AssigneeANS, Inc.
InventorsKyung-Bin Bae, Hee-Kook Park
Life of this patent
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AssigneeANS, Inc.
InventorsKyung-Bin Bae, Hee-Kook Park
Estimating the term…
The present invention relates to a plasma reactor for manufacturing electronic components which includes a reactor having a plasma generation region therein, and gas injection for injecting a reaction gas into the reactor. In the plasma reactor, a magnetic coil array unit is formed along an outer circumferential surface of the reactor, and a plurality of support members on which a coil is wound are installed along an outer circumferential surface of the reactor. A coil is wound onto each support member by a certain number of windings, and each magnetic coil is connected in series to each other in such a manner that the coils connected to neighboring support members have opposite polarities. The gas injector includes a gas spraying plate through which a gas is injected, and a separate gas spraying port formed in the gas spraying plate so that a main reaction gas and a mixing gas are sprayed along different paths.
A plasma reactor which comprises a reactor having a plasma generation region therein, and a gas injection means for injecting a reaction gas into the reactor, a magnetic coil array unit formed along an outer circumferential surface of the reactor, and having a plurality of support members, on which a coil is wound, installed along an outer circumferential surface of the reactor, the coil wound onto each support member by a certain number of windings, and each magnetic coil being connected in series to each other in such a manner that the coils connected to neighboring support members have opposite polarities, said gas injection means including a gas spraying plate through which a gas is injected into the reactor, and having a separate gas spraying port formed in the gas spraying plate so that a main reaction gas and a mixing gas are sprayed through different ports.
Dependencies are inferred from the claim text.