MEMS device assembly
AssigneeCookson Electronics, Inc.
InventorKenneth B. Gilleo
Life of this patent
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Abstract
An assembly of the present invention has a substrate and a first MEMS device adapted to be electrically and mechanically connected to the substrate. A first set of MEMS/substrate fluid transfer ports on the first MEMS device and on the substrate are adapted to mate with one another when the first MEMS device and substrate are connected to permit the transfer of fluid between the first MEMS device and the substrate.
Claims41
An assembly comprising
- a substrate,
- a first MEMS device adapted to be electrically and mechanically connected to the substrate, and
- a first set of MEMS/substrate fluid transfer ports on the first MEMS device and on the substrate adapted to mate with one another when the first MEMS device and substrate are connected to permit the transfer of fluid between the first MEMS device and the substrate.
An assembly comprising
- a substrate,
- first and second MEMS devices adapted for electrical and mechanical connection to the substrate,
- a first fluid transfer port on the first MEMS device for conveying fluid from the first MEMS device,
- a second fluid transfer port on the second MEMS device for conveying fluid to the second MEMS device,
- a fluid channel in the substrate in fluid communication with the first and second fluid transfer ports of respective MEMS devices whereby fluid may be transferred via said fluid channel and said fluid transfer ports from the first MEMS device to the second MEMS device.
An assembly comprising
- a first substrate,
- a second substrate,
- a first MEMS device adapted for electrical and mechanical connection to the first substrate,
- a second MEMS device adapted for electrical and mechanical connection to the second substrate,
- a first set of MEMS/substrate fluid transfer ports on the first MEMS device and on the first substrate adapted to mate with one another when the first MEMS device and the first substrate are connected to permit the transfer of fluid between the first MEMS device and the first substrate,
- a first set of MEMS/substrate fluid transfer ports on the second MEMS device and on the second substrate adapted to mate with one another when the second MEMS device and the second substrate are connected to permit the transfer of fluid between the second MEMS device and the second substrate,
- a fluid channel in the first substrate in fluid communication with said first set of MEMS/substrate fluid transfer ports on the first MEMS device and the first substrate,
- a fluid channel in the second substrate in fluid communication with said first set of MEMS/substrate fluid transfer ports on the second MEMS device and the second substrate,
- a first set of substrate/substrate fluid transfer ports on the first substrate and the second substrate adapted to mate with one another to permit the transfer of fluid between respective fluid channels in the first and second substrates so that fluid may be transferred between the first MEMS device and the second MEMS device.
A method for operating an integrated circuit of the type comprising a substrate, a first MEMS device adapted for electrical and mechanical connection to the substrate, and a first set of MEMS/substrate fluid transfer ports on the first MEMS device and the substrate adapted to mate with one another, said method comprising the steps of
- electrically and mechanically connecting the first MEMS device and the substrate in a position where the MEMS/substrate fluid transfer ports mate to permit the transfer of fluid between the MEMS device and the substrate,
- transferring fluid between the MEMS device and the substrate, said transferring step comprising passing the fluid through a channel in the substrate.
Dependencies are inferred from the claim text.