Dilute sulfuric peroxide at point-of-use
AssigneeApplied Materials, Inc.
InventorSteven Verhaverbeke
Life of this patent
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Abstract
Embodiments of the invention generally provide methods for removing a residue from a substrate surface, comprising mixing an aqueous solution with a hydrogen peroxide solution to produce a cleaning solution. The aqueous solution comprises sulfuric acid and hydrofluoric acid. A portion of the cleaning solution is applied to residue and the substrate surface a period. The portion of the cleaning solution is rinsed from the substrate surface with water to form a wash solution. The wash solution is discarded following cleaning of each wafer.
Claims37
A method for removing a residue from a substrate surface, comprising:
- mixing an aqueous solution comprising sulfuric acid and hydrofluoric acid with a hydrogen peroxide solution to produce a cleaning solution;
- applying an aliquot of the cleaning solution to a substrate surface for a period of time;
- and
- rinsing the aliquot from the substrate surface with water to form a wash solution.
A method for cleaning a residue from a substrate surface, comprising:
- exposing the substrate surface to an aliquot of a cleaning solution comprising sulfuric acid, hydrogen peroxide and hydrofluoric acid;
- rinsing the substrate surface with water to remove a residue and the aliquot of the cleaning solution;
- forming a wash solution comprising the water, the residue and the aliquot of the cleaning solution;
- and
- discarding of the wash solution.
A method of mixing and delivering a cleaning solution to remove a residue from a substrate surface, comprising:
- providing an aqueous solution comprising sulfuric acid and hydrofluoric acid;
- combining the aqueous solution and a hydrogen peroxide solution to form the cleaning solution;
- delivering the cleaning solution to a substrate surface;
- removing at least a portion of a residue from the substrate surface;
- and
- rinsing the substrate surface to remove the cleaning solution.
Dependencies are inferred from the claim text.