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US 2004/0163472 A1Published application
Acceleration sensor formed on surface of semiconductor substrate
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorTeruaki Nagahara
Life of this patent
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Abstract
In a movable space, a boundary (CN1) between a ceiling surface and a wall surface of a cap (CA) has a curved plane. When stress is exerted on the cap (CA), this stress is dispersed accordingly around the boundary (CN1) having a high probability of generation of a crack. Therefore, generation of a crack in the cap (CN) is unlikely.
Claims6
An acceleration sensor, comprising:
- a semiconductor substrate provided with an acceleration detecting section, said acceleration detecting section having a movable part for detecting an acceleration;
- a cap provided on a surface of said semiconductor substrate, said cap including a ceiling and at least one wall for defining a movable space for said movable part and hermetically sealing said movable space;
- and
- stress absorbing section for absorbing stress exerted on said cap.
1 more element
Dependencies are inferred from the claim text.