Thermal flow sensor
AssigneeCkd Corporation
InventorsAkihiro Ito, Yoshihiko Kawai
Life of this patent
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Abstract
A board mounting thereon a measuring chip is fixed to a body in close contact relation to form a main passage and a sensor passage inside of the body, while a hot wire for a temp. sensor and a hot wire for a flow velocity sensor, both being provided on the measuring chip, are bridged across the sensor passage, to measure the flow rate of a gas flowing in the inside of the body by means of an electric circuit on the back side of the board. In a state where an electrode for a hot wire on the measuring chip is joined to an electrode for the electric circuit on the board, the temp. sensor hot wire and the flow velocity sensor hot wire both provided on the measuring chip are connected to the electric circuit on the back side of the board.
Claims40
A thermal flow sensor including:
- a measuring chip provided with a hot wire and an electrode for the hot wire, the electrode being connected to the hot wire;
- a board having a front side on which an electrode for an electric circuit is provided, the electrode being connected to the electric circuit for performing a measuring principle using the hot wire;
- a body to which the measuring chip is attached in close contact relation to form a main passage;
- wherein at least one of the measuring chip and the board is formed with a groove, and a sensor passage in relation to the main passage is formed by the groove between the measuring chip and the board in a state where the measuring chip is mounted on the board with the hot wire electrode being joined to the electric circuit electrode, and the hot wire is laid across the sensor passage.
A thermal flow sensor including:
- a measuring chip provided with a hot wire and an electrode for the hot wire, the electrode being connected to the hot wire;
- an electric circuit electrode pin connected to an electric circuit for performing a measuring principle using the hot wire;
- a board in which the electrode pin is inserted;
- an elastic body which provides a seal between the electric circuit electrode pin and the board;
- and
- a body in which the board is attached in close contact relation to form a main passage;
- wherein a sensor passage in relation to the main passage is formed in a long slot shape by a thickness of the elastic body between the measuring chip and the board in a state where the measuring chip is mounted on a front side of the board with the hot wire electrode being joined to a flat head of the electric circuit electrode pin, and the hot wire is laid across the sensor passage.
Dependencies are inferred from the claim text.