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OwnerFrank Dimeo JR., Philip S.H. Chen +3inventors
InventorsFrank Dimeo JR., Philip S.H. Chen, Ing-Shin Chen, Jeffrey W. Neuner, James Welch
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A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The gas detector preferably employs a nickel-containing filament that is sensitive to the fluorine-containing species, which can function both as a sensing component and as a heat source when elevated temperature sensing is required. Such nickel-containing filament can be constructed with various compositions and configurations to improve its signal strength and responsiveness, and is particularly suitable for fluoro sensing operations at constant resistance (CR) mode.
A gas sensor assembly comprising a gas-sensing filament comprising nickel or nickel alloy, and means for detecting a change in at least one property of said gas-sensing filament upon contact with a target gas species and responsively generating an output signal indicative of presence of said target gas species.
A gas sensor assembly comprising a gas-sensing filament comprising a coating structure encapsulating a core structure, wherein said coating structure comprises a gas-sensitive material that exhibit a detectable change upon contact with a target gas species, and wherein said core structure is characterized by an electrical resistivity that is higher than that of the coating structure and a heat capacity that is lower than that of the coating structure.
A gas sensor assembly comprising a gas-sensing filament comprising a coating structure and a core structure, wherein said coating structure comprises nickel or nickel alloy, and wherein said core structure comprises silicon carbide.
A gas sensor assembly comprising a gas-sensing filament comprising a coating structure and a core structure, wherein said coating structure comprises nickel or nickel alloy, and wherein said core structure comprises a carbon center and a sheath of silicon carbide.
A gas sensor assembly comprising an electrochemically-thinned gas-sensing filament comprising nickel or nickel filament, wherein said filament is characterized by an average diameter of not more than 50 microns.
A method for forming a gas sensor assembly, comprising the steps of:
A gas sensor assembly comprising a gas-sensing filament comprising a nickel-copper alloy.
A gas sensor assembly comprising a gas-sensing filament comprising a nickel-copper-aluminum alloy.
A gas sensor assembly comprising a nickel-containing gas-sensing filament having a porous surface.
A gas sensor assembly comprising a support structure for suspending a free-standing nickel-containing gas-sensing filament.
A gas sensor assembly arranged in sensing relationship to a process chamber that is susceptible to presence of one or more target fluoro species, wherein said gas sensor assembly comprises a gas-sensing filament containing nickel or nickel-alloy, as mounted on a fluoro-resistant support structure and coupled to means for detecting a change in at least one property of said gas-sensing filament upon contact with the target fluoro species and responsively generating an output signal indicative of the presence of said target fluoro species.
Dependencies are inferred from the claim text.