Parts mounting method and parts mounting apparatus

A parts mounting method wherein a first part is suctioned by a suction head, and positioning is performed so as to mount said first part onto a second part held by a stage, said method comprising the steps of:

• preparing a first optical system with an optical axis directed toward said suction head from above, and a second optical system with an optical axis directed generally facing the optical axis of said first optical system, from below said stage;
• inserting said suction head between said first optical system and said second optical system so that said first optical system takes an image of a head reference mark provided to said suction head, which can be observed from above, and so that said second optical system takes an image of said first part suctioned to said suction head;
• inserting said stage between said first optical system and said second optical system so that said first optical system takes an image of said second part held on said stage, and so that the second optical system takes an image of a stage reference mark provided to said stage, which can be observed from below;
• calculating the relative position between said first part and said suction head, and the relative position between said second part and said stage, based upon image information from said first and second optical systems;
• detecting said head reference mark and said stage reference mark by said first and second optical systems with said suction head and said stage being positioned at the mounting position, and performing positional correction for at least one of said suction head and stage so that the positions of said first part and said second part satisfy a predetermined relation using the detected positional information and said relative positional information;
• and
• following said positional correction, mounting said first part onto said second part.