Method for manufacturing a micro-actuator
AssigneeSamsung Electronics Co., Ltd.
InventorsJin-ho Lee, Young-chul Ko, Do-hyun Kong
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Abstract
A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.
Claims9
A method for manufacturing a micro-actuator comprising the steps of:
- forming a top structure by etching both sides of a first plate, the top structure comprising a stage, a plurality of comb-type electrodes formed on the bottom of the stage, a torsion bar positioned in the middle of both edges facing the stage, and a first frame layer of a predetermined height supporting the torsion bar;
- forming a bottom structure by etching both sides of a second plate, the bottom structure comprising a base plate, a second frame layer formed on the base plate and having a predetermined height corresponding to the first frame layer height, and a plurality of fixed comb-type electrodes formed on the base plate;
- and
- joining the top and bottom structure to form one body by forming a eutectic bonding layer between the first frame layer and the second frame layer, and superimposing the driving and fixed comb-type electrodes such that the extensions of the driving comb-type electrodes alternate with the extensions of the fixed comb-type electrodes
Dependencies are inferred from the claim text.