Purging light beam paths in optical equipment
AssigneeHinds Instruments, Inc.
InventorsAndrew H. Breninger, Christopher O. Griffiths, Douglas C. Mark, Artemiy Mikheyev, Baoliang Wang
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Abstract
Purging of a light beam path in an effective manner that minimizes the affect of the purging requirement on system throughput. In one embodiment, the invention is incorporated into a birefringence measurement system that has several components for directing light through a sample optical element and thereafter detecting and analyzing the light. The segment of the beam path through the sample is isolated to reduce the volume that requires continual purging.
Claims37
An apparatus for projecting a light beam through an optical element to a detector, comprising:
- a first module including a source for the light beam;
- a second module including the detector;
- a sample module between the first and second modules, the sample module having a chamber that is isolated from the first and second modules;
- a holder for the optical element, the holder located in the chamber;
- and
- purging means for removing contaminants from the chamber.
A method of purging the path of a light beam in the vicinity of a sample holder through which the beam passes, wherein the light beam is part of an optical setup that has a number of optical elements, including a light source, the sample holder, and a detector, the method comprising the steps of:
- locating the sample holder in a chamber that is isolated from the other optical elements, whereby the separated elements are sealed in enclosures that are separate from the chamber;
- and
- directing purging gas into the chamber.
An assembly for analyzing optical properties of a sample, comprising:
- a first module including a first set of optical elements for providing a source of light and for modulating the polarization of the light that is then directed through the sample;
- a second module including a second set of optical elements for modulating the polarization of the light and detecting a characteristic of the light after that light passes through the sample;
- a sample chamber for holding the sample, the chamber being sealed from the first and second modules;
- and
- a purging system for purging the atmosphere inside the chamber.
A method of directing a light beam through an optical element, comprising the steps of:
- locating the optical element in a chamber;
- directing purging gas through a tube that has an open end that is adjacent to the optical element;
- and
- exhausting the chamber.
Dependencies are inferred from the claim text.