Pyrotechnic microactuators for microsystems

The microactuator as claimed in claim 1, characterized in that the chamber (63) is partially delimited by a folded flexible membrane (62) in said chamber (63), said membrane (63) being able to unfold under the effect of the gases emitted by the pyrotechnic charge (6). 9. The microactuator as claimed in either one of claims 7 and 8, characterized in that the membrane (4, 62) is made of Teflon. 10. The microactuator as claimed in claim 1, characterized in that the pyrotechnic charge (6) coats a heating conducting wire (6) passing through the chamber (2), the diameter of said wire (5) being between 10 μm and 100 μ. 11. A microsystem including a microactuator (1, 60) as claimed in any one of claims 1 to 10, characterized in that the deformation of the membrane (4, 62) causes a solid part (15, 21, 64) to move. 12. The microsystem as claimed in claim 11, characterized in that the solid part (15) pivots under the effect of the combustion gases and obstructs a fluid duct (12). 13. The microsystem including a microactuator (60) as claimed in any one of claims 1, 2, 3, 4, 5, 6, 8, 9 or 10, characterized in that:

• i) a flexible membrane (62) is situated in an annular space (63) that can be likened to a groove,
• ii) the pyrotechnic charge is situated in an annular space that can be likened to a groove smaller than the one in which the flexible membrane (62) is situated and positioned concentrically with respect to that groove, the two grooves communicating with each other via at least one opening,
• iii) a flat solid part (64) bears against the support (61), covering the annular space (63) in which the flexible membrane (62) is situated, said part (64) itself being covered by an elastic membrane (67) and blocking off a fluid duct (68), so that the gases emitted by the combustion of the charge lead to deployment of the flexible membrane (62) situated in the annular space (63) and cause the flat part (64) to move, causing fluid to be drawn up into the space that the elastic membrane (67) creates as it moves away from the support (61). 14. The microsystem including a microactuator as claimed in any one of claims 1, 2, 3, 4, 5, 6, 7, 8, 9 or 10, characterized in that the membrane (4) deforms under the effect of the combustion gases to obstruct a fluid duct. 15. The microsystem as claimed in claim 14, characterized in that the chamber (31) is partially delimited by a membrane (33) that is bistable such that said membrane (33), initially concave, becomes convex under the effect of the [lacuna] emitted by the charge (37). 16. The microsystem as claimed in either one of claims 12 and 14, characterized in that the element (15, 31) that obstructs the fluid duct (12, 38) is surmounted by a flexible protrusion (16, 34) to ensure a good seal at the closure of said duct (12, 38).